Digital Media World is running an extensive article on the VFX work of Star Wars Episode III Revenge of the Sith with comments from Animation Director Rob Coleman, Compositing Supervisor Eddie Pasquarello and Lead Animator Jamy Wheless. Also the MovieWeb website has put online the production notes on the film with comments by VFX Supervisors John Knoll and Roger Guyett as well as Rob Coleman.
The Digital Media World article goes into detail of simulating real cameras in Maya with MEL, the use of Shake, CompTime and Sabre on the film, the use of HDCAM, subsurface scattering use in characters like Yoda, animation with Maya and Cari, new cloth dynamics and digital stunt doubles. You can read it here:
The production notes (in PDF format) cover all aspects of the movie like principal photography, acting, music and VFX. The section dealing with ILM's VFX work is mainly a summary of the work present in the film: environments like Utapau, Kashyyyk and Mustafar, many done via miniatures, the space battles and digital characters like Yoda and General Grievous. You can get it here:
Originally spotted on VFXBlog.com.